PVD Coating Materials / Sputtering Targets
Scandium Metal Target
Specifications
| Product Name | Scandium Metal Target |
|---|---|
| Product Line | PVD Coating Materials |
| Category | Sputtering Targets |
| Formula / Composition | Sc |
| Purity | 99.95%~99.99% |
| Standard Size | Round Target Dia < 350mm; Rectangular Target Width < 240mm; Rectangular Target Length < 550mm; Tube Target OD < 300mm |
| Packaging | Vacuum packaging |
| Customization | Yes |
Product Features
Prepared from high-purity feedstock under controlled processing for stable and uniform thin-film deposition.
Applications
Co-sputtered with aluminum targets to prepare ScAlN piezoelectric films, whose piezoelectric coefficient is much higher than pure AlN. These films are used in BAW and SAW RF filters and RF MEMS sensors, broadening communication bandwidth and improving signal filtering performance. They are core coating materials for mobile phones and base-station RF front ends, and are also used in ultrasonic transducers and IoT vibration energy harvesters.
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