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PVD Coating Materials / Sputtering Targets

Copper Metal Target

金属铜靶

Copper Metal Target product image

Specifications

Product NameCopper Metal Target
Chinese Name金属铜靶
Product LinePVD Coating Materials
CategorySputtering Targets
Formula / CompositionCu
Purity99.99%~99.999%
Standard SizeRound Target Dia < 350mm;
Rectangular Target Width < 240mm;
Rectangular Target Length < 550mm;
Tube Target OD < 300mm
Packaging真空包装
Customization

Product Features

圆形,方形,可绑定

원형, 정사각형, 바인딩 가능

Applications

高纯铜溅射靶材主要用于半导体芯片铜互连、先进封装籽晶层,以及显示面板TFT低阻金属布线,是集成电路与高世代面板核心导电耗材。也用于光伏电池导电膜、电磁屏蔽镀层、柔性线路与各类传感器件导电薄膜沉积。

High-purity copper sputtering targets are mainly used for copper interconnects in semiconductor chips, seed layers for advanced packaging, and low-resistance TFT metal wiring in display panels, making them core conductive materials for integrated circuits and high-generation panels. They are also used for photovoltaic conductive films, electromagnetic shielding coatings, flexible circuits, and conductive films for sensor devices.

고순도 구리 스퍼터링 타깃은 주로 반도체 칩의 구리 배선, 첨단 패키징용 시드층, 디스플레이 패널의 저저항 TFT 금속 배선에 사용되며 집적회로 및 차세대 패널의 핵심 전도성 소재입니다. 또한 광전지 전도성 필름, 전자파 차폐 코팅, 유연한 회로 및 센서 장치용 전도성 필름에도 사용됩니다.

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